High process sensitivity: Key equipment such as etching machines and ion implanters generate a large amount of heat during operation, and a temperature fluctuation of ±0.5°C may lead to deviations in film thickness uniformity
Continuous production demand: 24-hour uninterrupted production requires the cooling system to operate with zero malfunctions
Energy consumption pressure: The original cooling system has a low energy efficiency ratio, and the proportion of electricity costs in total production costs continues to rise
Strict water quality requirements: The purity of cooling water must meet semiconductor-grade standards to prevent pipeline corrosion and impurity contamination
Core technical configuration
We provided the enterprise with the BTS-420/2T series ultra-high precision temperature and flow control chiller, featuring the following professional characteristics:Temperature control
Local control and remote control, setpoint mode and program mode;This series offers independent control over temperature, flow, and pressure
Fine differential temperature control technology
Key equipment such as etching machines and ion implanters generate a large amount of heat during operation, and a temperature fluctuation of ±0.5°C may lead to deviations in film thickness uniformity. By adopting PID+ fuzzy control algorithm, a temperature control precision of ±0.05°C can be achievedMultiple water quality assurance systems
Features built-in reverse osmosis + EDI, ensuring a constant resistivity of 18.2 MΩ·cmThe all-stainless steel flow channel design prevents metal ion contamination
Online water quality monitoring and automatic sewage discharge system
Self-diagnostic function
Key equipment such as etching machines and ion implanters generate a large amount of heat during operation, and a temperature fluctuation of ±0.5°C may lead to deviations in film thickness uniformity. Power-on self-diagnostics automatically verify sensor integrity and system readiness.Semiconductor-grade reliability design
Key components (compressor, water pump) feature N+1 redundancyAutomatic dual-power switching ensures uninterrupted operation of process equipment
Efficient energy-saving solution
Equipped with a maglev inverter compressor, it achieves an energy efficiency ratio of 8.5 under partial-load conditionsThe heat recovery system recovers waste heat for plant heating, delivering 30% overall energy savings
Ice thermal storage during off-peak hours shaves peak electrical demand
Process quality improvement
Temperature stability of key equipment: The fluctuation range narrowed from ±0.8°C to ±0.5°C
Wafer yield enhancement: The etching process yield increased from 92.3% to 95.7%, delivering approximately RMB 12 million in additional annual value from this optimization alone
Overall equipment effectiveness (OEE): Temperature-related equipment downtime dropped by 85%
Optimization of operating costs
Power consumption: Cooling system energy consumption cut by 42%, saving approximately RMB 2.8 million annually in electricity costs
Maintenance cost: The preventive maintenance system reduces emergency repairs by 60%
Water resource utilization: The closed-loop water system saves 90% of water
Environmental and safety benefits
Noise control: The operating noise is approximately 75 dB, improving the cleanroom working environment
Zero leakage design: No coolant leakage incidents throughout the year
Intelligent monitoring: Integrated into the plant FMCS to enable remote operation and maintenance
“This chiller system has become the ‘temperature guardian’ of our advanced process line. It not only solves a long-standing temperature control challenge, but also uses its intelligent early warning function to prevent potential production interruptions multiple times. Cooperation with Chiler Chiller is an important part of our efforts to enhance core competitiveness.”
Industry Application InsightsAs semiconductor manufacturing advances toward smaller process geometries, the control of process environments has become exceptionally demanding. Our chiller solutions demonstrate that:
Temperature accuracy is yield: In nanoscale manufacturing, temperature control has evolved from an auxiliary parameter to a critical process variable
Reliability is productivity: Semiconductor manufacturing equipment demands heavy capital investment, and the reliability of the cooling system directly affects the return on investment报
Energy saving and quality go hand in hand: Advanced thermal management technology can not only enhance process quality but also significantly reduce operating costs.
In the semiconductor industry, often hailed as the “crown jewel of manufacturing”, every technical detail dictates product success or failure. Exceeding industry standards in precision and reliability, Chiler Intelligent’s chillers provide a rock-solid foundation for chip manufacturing environments. With the evolution of third-generation semiconductor and advanced packaging technologies, we are committed to delivering smarter, more efficient thermal control solutions to the semiconductor industry through continuous innovation.